Semiconductor Fab Equipment Manufacturing worked example

Particle Control Risk with contamination severity if it reaches the wafer of 15 score: a worked example

This scenario runs the particle control risk calculation on the strong side: contamination severity if it reaches the wafer of 15 score, with every other input held at its documented default. Use it when particle control risk in semiconductor fab equipment manufacturing needs a defensible ranking against other semiconductor fab equipment manufacturing risks for the next review.

The inputs for this scenario

  • Contamination severity if it reaches the wafer: 15 score (raised for this scenario; the documented default is 6)
  • Likelihood of a particle excursion: 4 score (unchanged)
  • Detectability before shipment: 3 score (unchanged)

Working through the calculation

  • Applying the documented formula (Particle control risk score = particle control risk severity score × particle control risk occurrence score × particle control risk detection score) to the inputs above produces each figure below.
  • At this operating point the engine returns 8.15 score for particle control risk score, the number this scenario is built around.
  • At this operating point the engine returns 15 score for particle control risk severity score.
  • At this operating point the engine returns 4 score for particle control risk occurrence score.
  • At this operating point the engine returns 3 score for particle control risk detection score.

How this compares with the baseline

  • Against the tool's baseline example, where contamination severity if it reaches the wafer sits at 6 score and the headline result is 4.55 score, this scenario comes in 79.12% above the baseline at 8.15 score.
  • Use it during a contamination FMEA or design review to rank and prioritize particle-generation risks. Treat this as a target state: the delta against the baseline quantifies what the improvement is worth before you commit to chasing it.

Results at a glance

  • Particle control risk score: 8.15 score (headline result)
  • Particle control risk severity score: 15 score
  • Particle control risk occurrence score: 4 score
  • Particle control risk detection score: 3 score

Run it with your numbers

  • Every input above is editable in the live Particle Control Risk calculator, which recalculates instantly and can be shared with the inputs intact.

Last reviewed 2026-05-12.