How do you calculate acceptance throughput?

Multiply output per cycle by available cycles to get gross capacity, then multiply by uptime and first-pass yield. With 4 wafers/cycle, 480 cycles, 90% uptime and 97% yield you get 1,920 gross and 1,676 good accepted units.

What is the difference between gross and good accepted capacity?

Gross capacity is the raw cycle math (1,920 units here) assuming zero downtime and perfect yield. Good accepted capacity (1,676 units) is what survives after subtracting the 192-unit downtime loss and the 52-unit yield loss.

What is a good acceptance-test first-pass yield for fab equipment?

Marathon acceptance runs typically contract for 95-99% first-pass yield. At 97% the tool loses only about 52 units to yield here; below 95% most FAT protocols flag the tool for rework before sign-off.

Why does uptime matter more than yield in this example?

At 90% uptime the tool loses 192 units to downtime versus only 52 to yield, so a single point of availability recovery is worth roughly four times a point of yield at these settings.

How do I convert this to wafers per hour?

Divide good accepted capacity by the shift length. If 480 cycles span an 8-hour shift, 1,676 good units is about 209 accepted wafers per hour.

Can I use this for a marathon qualification run instead of a single shift?

Yes. Set available cycles to the total cycles in the marathon window and the result becomes the good accepted capacity for the whole qualification, which is exactly what SAT sign-off compares against the contracted rate.

Semiconductor Fab Equipment Manufacturing calculator

Acceptance Throughput Calculator

Acceptance Throughput measures how many wafers a fab tool can actually pass through its acceptance-test protocol per shift after downtime and first-pass yield are accounted for. Process integration engineers and equipment acceptance teams use it during factory acceptance test (FAT) and site acceptance test (SAT) to confirm a new deposition, etch, or litho tool meets its contracted marathon-run rate. It matters because a tool that hits its nameplate cycle rate but stalls or scraps wafers during qualification will not deliver the capacity the ramp plan assumed, and every accepted-capacity shortfall shows up directly as missed wafer starts.

What this calculator does

Estimate acceptance throughput for semiconductor fab equipment manufacturing using production-ready inputs so teams can confirm whether capacity can cover demand before committing the schedule.
Use it when acceptance throughput in semiconductor fab equipment manufacturing is being asked to take on more work and you need to know if there is room.
It computes good accepted capacity by multiplying output per cycle and available cycles into a gross capacity, then derating that gross figure by acceptance-test uptime and first-pass yield.

Formula used

Gross acceptance throughput capacity = acceptance throughput output per cycle × available acceptance throughput cycles
Good acceptance throughput capacity = gross capacity × expected acceptance throughput uptime × expected acceptance throughput first-pass yield

Inputs explained

Wafers accepted per acceptance-test cycle:
Acceptance-test cycles available per shift:
Tool acceptance-test uptime:
Acceptance-test first-pass yield:

How to use the result

Use it during tool acceptance runs, marathon qualification, or capacity modeling when you need to translate a raw cycle rate into wafers the tool will genuinely accept and pass.
It treats uptime and yield as independent flat percentages over the run, so it will overstate capacity if downtime clusters or if yield degrades as the tool heats up or consumables wear.

Current U.S. benchmarks

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Common questions

How do you calculate acceptance throughput? Multiply output per cycle by available cycles to get gross capacity, then multiply by uptime and first-pass yield. With 4 wafers/cycle, 480 cycles, 90% uptime and 97% yield you get 1,920 gross and 1,676 good accepted units.
What is the difference between gross and good accepted capacity? Gross capacity is the raw cycle math (1,920 units here) assuming zero downtime and perfect yield. Good accepted capacity (1,676 units) is what survives after subtracting the 192-unit downtime loss and the 52-unit yield loss.
What is a good acceptance-test first-pass yield for fab equipment? Marathon acceptance runs typically contract for 95-99% first-pass yield. At 97% the tool loses only about 52 units to yield here; below 95% most FAT protocols flag the tool for rework before sign-off.
Why does uptime matter more than yield in this example? At 90% uptime the tool loses 192 units to downtime versus only 52 to yield, so a single point of availability recovery is worth roughly four times a point of yield at these settings.
How do I convert this to wafers per hour? Divide good accepted capacity by the shift length. If 480 cycles span an 8-hour shift, 1,676 good units is about 209 accepted wafers per hour.

Last reviewed 2026-05-12.